California Facilities

Our facilities are purpose-built for electro-optic device manufacturing with 1,000+ precision tools covering every step of the fabrication process.

1,000+ Precision Tools

Industry-leading tools for lithography, etching, deposition, ion implantation, and metrology.

100% USA Supply Chain

All fabrication done in-house at our California facilities.

Full-Flow Fabrication

From wafer fabrication through lithography, etching, metallization, stacking, and testing.

NantOptiFab California Location

Precision Fabrication Tools

Our facilities are equipped with world-class tools covering every step of the photonic chip fabrication process.

Lithography & Patterning

SUSS Microtec MA150 E

Mask Aligner Exposure

Dymax 5000

UV Curing Flood Lamp

Brewer Science 1300

Soft Bake Hotplate

Etching & Plasma Processing

Plasma-Therm VERSALINE

Advanced Plasma Etch System

Oxford Plasmalab 100

RIE System

PVA TePla 300

Semi-Auto Plasma System

Samco-ucp LFC150

H2 Plasma Cleaner

GASONICS AURA 1000

Plasma Asher

MATTSONA Aspen II

SHER/STRIPPER System

Deposition & Thin Film

YES-1224P

Chemical Vapor Deposition System

Evatec CLUSTERLINE 200

PVD Cluster Deposition System

AJA International ATC 2200-V

Sputtering System

Biolin Scientific NIMA

LB Deposition Trough System

Ion Implantation & Trimming

Axcelis NV-8250

Mid Current Implanter

TEL Epion ULTRATRIMMER 30

NF3 Trimmer

Wet Processing & Cleaning

Sitek 480-S

Spin Rinse Dryer

SEZ/EPCOS AG

Spin Processor 101

PVA Tepla Gigabatch

Batch Plasma Cleaning System

Metrology & Thermal Processing

Nikon Inexiv VMA-2520

Automated Measuring System

Thermo Scientific VT6130

Vacuum Oven

Interested in Our Capabilities?

Contact our team to discuss your photonic fabrication requirements.